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ANCORP

Williston,  FL 
United States
http://www.ancorp.com
  • Booth: 5541

Industry-leading high vacuum ball valves at booth #5541!

Overview

With over five decades of experience in manufacturing high and ultra-high vacuum components, ANCORP has become a leading global supplier of vacuum ball valves. Our patented vacuum ball valve is perfect for the harsh environments of today's PVD and MOCVD processes and greatly increases your productivity by reducing valve failures and system downtime.

Manufacturer of high and ultra-high vacuum components since 1965, ANCORP (formerly A&N Corporation) offers an extensive line of vacuum flanges, fittings, feedthroughs, traps, viewports, valves, chambers, and custom fabrications to researchers, OEMs, and industrial users around the world. ANCORP is a North American distributor of VAT vacuum valves and the exclusive global distributor of LOS Low Outgassing Solutions UHV/XHV-compatible bimetal, titanium, and aluminum flanges, fittings, and custom fabrications. ANCORP products meet or exceed the standards required by our customers, such as those involved with thin film deposition, surface analysis, laser devices, cryogenics, and the aerospace industry.

  Press Releases

  • Semiconductor Subfabs

    The semiconductor industry has made remarkable progress in recent years, leading to the development of ever smaller and more powerful chips. However, these advancements would not have been possible without a clean room powered by an efficient subfab.

    Cleanrooms play a critical role in semiconductor manufacturing, ensuring the cleanliness and integrity of the production environment. The range of process tools in the cleanroom is vast, and maintaining their functionality and cleanliness is essential to producing high-quality chips. The maintenance of the process tools in the cleanroom is essential to achieving this goal and most tools receive vacuum and abatement services in the subfab. An effective clean room creates an environment designed to minimize the introduction, generation, and retention of airborne particles during semiconductor manufacturing and is supported and often controlled by the subfab below the cleanroom.

    Subfab systems are responsible for providing the necessary materials and utilities required to create semiconductor devices, as well as managing and treating the waste products generated during the manufacturing process. Deposition processes like metal-organic chemical vapor deposition (MOCVD) and ion-beam deposition (IBD) require a range of specialized utilities, such as gas and chemical delivery systems, vacuum systems, and temperature control systems.

    The precursor gases delivered through these delivery systems can also be highly reactive and hazardous to both human health and the environment. The subfab must ensure that they are stored, transported, and delivered safely and effectively. Pumping and abatement systems in the subfab are responsible for the removal and treatment of waste gases and byproducts generated from deposition processes. This is made possible through the use of specialized vacuum components and valves.

    Ball Valves

    An essential component to subfab processes is an isolation valve. They are used to control the flow of chemicals, gasses, and other substances used in the production of semiconductor devices. Valves also regulate the pressure and flow rates of these materials, ensuring that they are delivered accurately and efficiently.

    ANCORP’s engineered solution for process challenges faced in the subfab is the Extended Life (XL) Ball Valve. Made from inert materials such as 316L stainless steel with PTFE seats, the valve offers flexibility for space constraints, has a self-cleaning action, and is resistant to corrosion.....

    Continue reading at https://ancorp.com/blog/maximizing-semiconductor-subfab-efficiency-with-high-vacuum-ball-valves/ 

  Products

  • High Vacuum Ball Valve
    The corrosive-resistant, fast-actuating design of ANCORP’s vacuum ball valves makes them ideal for isolating reactors, traps, and scrubbers on vacuum process tools....

    • 2-Way Ball Valves

    Extended-Life (XL) Design Response

    When leading OEM’s came to ANCORP looking for a more durable valve for today’s harsh coating processes, ANCORP engineers went to work testing new stem designs – the XL design was born. This patented design extends the stem seal life by 10X and features a fully stabilized stem along with all the other features of ANCORP ball valves. In short, the XL ball valve reduces the need for valve maintenance, decreases tool downtime, and increases throughput. It’s the reason ANCORP remains the leading innovator in vacuum ball valves.

    The corrosive-resistant design of ANCORP vacuum ball valves makes them ideal for isolating reactors, traps, and scrubbers on vacuum coating tools used for MOCVD, PVD, CVD, and other thin-film coating processes.

    Ball valves offer a straight-through, unimpeded flow (or a diverting flow in 3-way ball valves) with a minimal valve body footprint. Due to their unique design, ball valves are less sensitive than other vacuum valves to particulate contamination; therefore, they are especially useful in vacuum applications with high amounts of particulate effluent. For example, ball valves are almost always used to isolate scrubbers and traps downstream of the rough pumping system. 

    XL Benefits
    • Stabilized stem seal to eliminate atmospheric intrusion into the process line
    • Sealing capabilities maintain vacuum under high temperature/harsh process conditions
    • Stem seal assembly accommodates all perfluoroelastomers (FKM or FFKM) (i.e. varying TCE’s)
    • Increased the MTBFF of the valve 10X
    • Improved stem seal assembly life 100X
    • Reduced end-user maintenance complications

    ANCORP offers three types of XL High Vacuum Ball Valves, each with their own benefits:

    2-way valves (excluding B-series)

    3-way valves

    High Conductance valves

  • High Conductance Ball Valve
    ANCORP’s High Conductance (HC) high vacuum ball valve provides maximum conductance with a fully ported ball and a reduced overall length two-piece 316L stainless steel body....

    • High Conductance Ball Valve

    ANCORP’s High Conductance (HC) Vacuum Ball Valve provides maximum conductance with its fully ported ball and reduced overall length, two-piece 316L stainless steel body. Its improved smooth contour maximizes heat transfer between the valve and heating components. The valve is opened or closed manually or pneumatically by 1/4 turn, quick actuation.

    Features
    • Fully bored ball port: Maximizes conductance with straight-through, unimpeded flow
    • Minimized overall length and slimmer profile: Increases conductance and reduces weight and footprint
    • Two-piece body: One less body O-ring seal means one less potential leak path and huge maintenance cost reductions when using perfluoroelastomers (FFKM)
    • Smooth contour: Maximizes heat transfer from heating components
    • Extra space between body & handle brackets: Minimum of 5/8” clearance allows more room for heating components
    • Adjustable stroke pneumatic actuator: Adjusts to +/-5° to ensure proper open/close over life of the valve
    • Integrated handle lock: Prevents accidental opening/ closing. Lock out-tag out ready
    • Heater-ready design
    • Applications 

    The HC Ball Valve is manufactured from corrosive resistant materials to perform effectively in aggressive processes and on exhaust lines. This valve can be configured to be heated and insulated for temperature stability inside the valve. Body and stem seals can be changed to meet customer specific processes as required. This valve also works exceptionally well in systems that create deposition within the vacuum lines. The PTFE sealing surface is protected from direct deposition, maintaining a clean dynamic seal to prevent failure due to contamination. The HC Ball Valve is an extremely robust high vacuum valve designed to perform in the most challenging environments.

Categories

202 Other Equipment
  • Space simulation; Vacuum chambers
  • Vacuum drying & out gassing Systems
    • 400 Components, Parts & Accessories
  • Flow Control: Valves; Meters; Gauges; Regulators; MFC's
  • Gaskets; Seals; O rings; Elastomers; Resins
  • Pipe; Tubing; Hose; Flanges; Connectors; Couplings; Fittings
  • Vacuum Systems Components and Accessories

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